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SPECS EnviroMETROS FAB is the perfect routine analysis metrology tool for wafers up to 200 mm (8″) or up to 300 mm (12″); with possibility to integrate to wafer handler systems, clean room and SEMI standard compliant.

SPECS EnviroESCA overcomes the barriers of standard XPS systems by enabling analyses at pressures far above UHV.

Our glovebox systems maintains oxygen and moisture levels below 1ppm. Ideal for thermal evaporation, lithium batteries, OLEDs, and more. Available in 2, 3, and 4 glove port models to fit your needs.

CreaTec Fischer & Co. GmbH designs and manufactures Molecular Beam Epitaxy (MBE), Physical Vapor Deposition (PVD) systems and accessories. 

Sputter, E-beam, Thermal, Pulsed laser, Cluster tools and ion beam etching systems.

BesTec GmbH specialised in design and manufacturing of customer specific ultrahigh vacuum systems (UHV systems).

IONICON ANALYTIK is the world’s leader in ultra-sensitive real-time trace gas (VOC) analyzers based on the unique Proton Transfer Reaction – Mass Spectrometry (PTR-MS) and proprietary SRI-MS technology.