Vacuum Measurement Instruments
Wide Range Gauge
• Pressure measurement from atmosphere to UHV by a combination of Pirani and Bayard-Alpert-Ionisation principle with only one sensor.
• Measuring range 1000 – 1 x 10-10 mbar.
Pirani Gauge
• Active thermal conductivity vacuum gauge of Pirani
• Measuring range from 5 x 10-4 to 1000 mbar
• Display range from 5 x 10-5 to 1000 mbar
• Compatible with controllers from Inficon, Leybold and Pfeiffer as TTR sensor
UHV Ion Gauges
• Nude ionization gauges are high-sensitivity UHV Bayard-Alpert ion gauges.
• Wide UHV measuring range: 1 x 10-3 to 3 x 10-11 mbar.
Matching Pirani Gauge
• Bakeable and non-bakeable
• Range 200 to 1 x 10-3 mbar
• Can be used with UHV ion gauges enabling a continuous measurement range of 1200 mbar to 3 x 10-11 mbar
Residual Gas Analysers (RGA)
• Residual Gas Analyzer with Integrated Pirani and Ion Gauge
• 100, 200 and 300 amu systems
• Faraday Detector with optional Electron Multiplier
• Real-time Windows® software capable of Multi-head operation
• Field Replaceable Dual Thoriated Iridium Filaments
• Better than 1 amu resolution
• 8 orders of magnitude dynamic range in a single scan
• Mass spectra, leak detection and pressure vs time modes
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